Established in 1996, the National Key Laboratory of Science and Technology on Micro/Nano Fabrication is constituted by efforts from Peking University (the leading role) and Shanghai Jiaotong University. It currently has 57 faculty and staff members, including 31 full professors, and 18 associate professors. Among them, there are 3 Chinese Academy Science members, 1 Changjiang Scholar, and 3 recipients of Distinguished Young Scholars of NSFC, 2 chief scientists of National Basic Research Program of China (National 973 program).
The Peking University part of the national key laboratory mainly focuses on the silicon-based micro/nanofabrication techniques and the integration solution of microelectromechanical system (MEMS) and integrated circuit (IC). Main research areas include:
(1) Design and fabrication of MEMS/NEMS
(2) Advanced MEMS/NEMS sensors and actuators
(3) Three-dimensional integration and MEMS-CMOS integration technology
(4) Micro/nanosystem technology