主题：New trends in Electrical Scanning Probe Techniques for Device and Thin Film Characterization
报告人：Guenther Benstetter Steinbeis,TechnologyTransferCenter,StuttgartandDeggendorf,Germany
The presentation reviewsselected applications of scanning probe microscopy(SPM) techniques for the electrical characterization of electronic devices and thin films. Subsequently novel scanning capacitance microscopy (SCM) based techniques are discussed in more detail. Starting with well-established SPM methods such as Kelvin-probe force microscopy(KPFM) and conductive atomic force microscopy(CAFM)new techniques such as intermittent scanning capacitance microscopy(ICSCM) are explained and case studies are demonstrated.