Yu, Xiaomei


Research Interests: MEMS/NEMS

Office Phone: 86-10-6276 6592


Yu, Xiaomei is a professor in the Department of Computer Science and technology, School of PKU since 2008. She obtained her B.Sc. and M.Sc. degree from Jilin University in 1982 and 1985, and Ph.D. from Beihang University in 2001 respectively. Her research interests include BioMEMS, Optical MEMS and micro/nano fabrication technologies.

Dr. Yu has published more than 100 research papers, and most of them are published in top-tier conferences and journals, such as APL, SNB, OL, OE, JMEMS. She also is authorized more than 20 patents.

Dr. Yu has more than ten research projects including NSFC, 863 project, etc. Her research achievements are summarized as follows:

1)  Metamaterial techniqueHer major researches in metamaterial field is the metamaterial absorbers and gradient metasurfaces at short and mid-infrared, as well as in THz regime. Various single-band, dual-band and broadband metamaterial absorbers are designed and fabricated with peak absorptions higher than 95% in the target waveband. Polarization independent and incident angle insensitive gradient metasurfaces are also created to focus IR and THz wave.

2)  Infrared uncooled imaging technique She devotes on this research for more than 10 years and developed a few novel fabrication processes for IR Focal Plane Arrays (FPA). IR FPAs including 256×256 pixels were fabricated and images of human body at room temperature for long-wavelength IR and two lasers at short or mid-wavelength IR were captured, which verifies the full-band response of the designed FPAs. By integrating metamaterial absorber into the FPA pixel, the average NETD of the device drops obviously compared with FPA using conventional SiNx absorber. These results provide feasible solution to uncooled, low cost and portable IR imaging system.

3)  Terahertz FPA technique: At present, thermal THz detectors may realize real-time THz imaging with a focal plane array (FPA), but suffer from low sensitivity as lacking suitable absorbing materials. She proposed a novel photomechanical THz FPA by conveniently integrating THz metamaterial absorber into a bi-material cantilever pixel. A polyimide sacrificial layer technique was developed to fabricate the device on a glass wafer and THz images and video of various objects, as well as infrared images of human body were captured successfully with the fabricated meta-molecule array. The proposed photomechanical device presents fascinating application values in single and broad band THz, as well as infrared imaging.

4)  Cantilever-based biosensor: She designed and fabricated silicon-based and flexible piezoresistive microcantilever with high SNR. By using the aptamers functionalized cantilever-based sensors, sensitive and real-time detections on biological and chemical toxic agents, including ricin, Staphylococcus enterotoxin B (SEB), β-bungarotoxin (β-BGT), abrin, sarin (GB) and VX, etc were successfully realized at room temperature. Piezoresistive microcantilever provide an effective means for the on-site biochemical detections with the advantages of easy readout and integration.